CERN Accelerating science

Book
Title Rapid thermal processing of semiconductors
Book cover
Author(s) Borisenko, Victor E ; Hesketh, Peter J
Publication Boston : Springer, 1997.
Series (Microdevices Physics and Fabrication Technologies)
Subject category Engineering
Abstract Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions They thoroughly cover the work of international investigators in the field
ISBN 9781489918048 (This book at Amazon) (electronic version)
9781489918062 (This book at Amazon) (print version)
DOI ebook: 10.1007/978-1-4899-1804-8
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 Record created 2014-02-24, last modified 2019-07-30