CERN Accelerating science

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Report number AIDA-2020-D4.3
Title Through silicon vias production
Author(s) Re, Valerio (INFN)
Imprint 2019-12-19
Series (AIDA-2020 ; 4.3)
Subject category Detectors and Experimental Techniques ; 4: Micro-electronics and interconnections
Submitted by sabrina.el.yacoubi@cern.ch

 


 Record creato 2019-12-19, modificato l'ultima volta il 2019-12-19


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